Silicon Carbide (SiC) Ceramic Plate
Detailed Diagram
Product Overview
Silicon Carbide (SiC) Ceramic Plates are high-strength, high-purity advanced ceramic components engineered for environments requiring exceptional thermal stability, mechanical robustness, and chemical resistance. With excellent hardness, low density, and superior thermal conductivity, SiC plates are widely used in semiconductor processing, high-temperature furnaces, precision machinery, and corrosive industrial environments.
These plates maintain structural integrity under extreme conditions, making them an ideal material solution for next-generation high-performance equipment.
Key Features & Properties
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High hardness & wear resistance – Comparable to diamond, ensuring long service life.
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Low thermal expansion – Minimizes deformation under rapid heating or cooling.
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High thermal conductivity – Efficient heat dissipation for thermal control systems.
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Outstanding chemical stability – Resistant to acids, alkalis, and plasma environments.
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Lightweight yet extremely strong – High strength-to-weight ratio compared to metals.
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Excellent high-temperature performance – Working temperatures up to 1600°C (depending on grade).
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Strong mechanical rigidity – Ideal for precise support and structural stability.
Manufacturing Method
SiC ceramic plates are typically produced through one of the following processes:
• Reaction-Bonded Silicon Carbide (RBSC / RBSiC)
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Formed by infiltrating molten silicon into a porous SiC preform
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Features high strength, good machinability, and dimensional stability
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Suitable for large plates requiring tight flatness control
• Sintered Silicon Carbide (SSiC)
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Produced through pressureless sintering of high-purity SiC powder
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Offers superior purity, strength, and corrosion resistance
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Ideal for semiconductor and chemical applications requiring ultra-clean conditions
• CVD Silicon Carbide (CVD-SiC)
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Chemical vapor deposition process
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Highest purity, extremely dense, and ultra-smooth surface
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Common in semiconductor wafer carriers, susceptors, and vacuum chamber parts
Applications
SiC Ceramic Plates are widely used across multiple industries:
Semiconductor & Electronics
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Wafer carrier plates
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Susceptors
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Diffusion furnace components
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Etching & deposition chamber parts
High-Temperature Furnace Components
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Support plates
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Kiln furniture
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Heating system insulation and protection
Industrial Equipment
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Mechanical wear plates
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Sliding pads
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Pump and valve components
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Chemical corrosion-resistant plates
Aerospace & Defense
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Lightweight high-strength structural plates
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High-temperature shielding components
Specifications & Customization
SiC ceramic plates can be manufactured according to customized drawings:
• Dimensions:
Thickness: 0.5–30 mm
Max side length: up to 600 mm (varies by process)
• Tolerance:
±0.01–0.05 mm depending on machining grade
• Surface Finish:
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Ground / lapped
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Polished (Ra < 5 nm for CVD-SiC)
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As-sintered surface
• Material Grades:
RBSiC / SSiC / CVD-SiC
• Shape Options:
Flat plates, square plates, round plates, slotted plates, perforated plates, etc.
FAQ of Quartz Glasses
Q1: What is the difference between RBSiC and SSiC plates?
A: RBSiC offers good mechanical strength and cost performance, while SSiC has higher purity, better corrosion resistance, and higher strength. SSiC is preferred for semiconductor and chemical applications.
Q2: Can SiC ceramic plates withstand thermal shock?
A: Yes. SiC has low thermal expansion and high thermal conductivity, which ensure excellent thermal shock resistance.
Q3: Can the plates be polished for mirror surface applications?
A: Yes. CVD-SiC and high-purity SSiC can achieve mirror-grade polishing for optical or semiconductor requirements.
Q4: Do you support custom machining?
A: Yes. Plates can be fabricated according to your drawings, including holes, slots, recesses, and special shapes.
About Us
XKH specializes in high-tech development, production, and sales of special optical glass and new crystal materials. Our products serve optical electronics, consumer electronics, and the military. We offer Sapphire optical components, mobile phone lens covers, Ceramics, LT, Silicon Carbide SIC, Quartz, and semiconductor crystal wafers. With skilled expertise and cutting-edge equipment, we excel in non-standard product processing, aiming to be a leading optoelectronic materials high-tech enterprise.
