Industrial SiC Vertical Furnace Tube High Thermal Conductivity & Corrosion Resistant

Short Description:

Engineered as the outer process tube in vertical furnaces, our silicon carbide (SiC) tube delivers a tightly controlled atmosphere and highly uniform temperature field. It is built to endure prolonged exposure to ~1200 ℃ and complex process gases, demanding ultra-high purity, strong thermal performance, and rock-solid structural integrity.

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Features

Detailed Diagram

Silicon Carbide Vertical Furnace Tube — Product Overview

Quartz glass sheets, also known as fused silica plates or quartz plates, are highly specialized materials made from high-purity silicon dioxide (SiO₂). These transparent and durable sheets are valued for their exceptional optical clarity, thermal resistance, and chemical stability. Due to their superior properties, quartz glass sheets are widely used across multiple industries, including semiconductors, optics, photonics, solar energy, metallurgy, and advanced laboratory applications.

Our quartz glass sheets are manufactured using top-grade raw materials such as natural crystal or synthetic silica, processed through precision melting and polishing techniques. The result is an ultra-flat, low-impurity, and bubble-free surface that meets the most stringent requirements of modern industrial processes.

Key Features

One-piece 3D-printed structure
Eliminates seams and stress concentrators to maximize mechanical strength and reliability.

Ultra-low impurities
Base material < 300 ppm; CVD-coated surface < 5 ppm—minimizing contamination for ultra-clean processing.

High thermal conductivity
Fast, even heat transfer enables precise temperature control and tight across-wafer uniformity.

Excellent thermal shock tolerance
Handles frequent hot/cold cycling without cracking—extending service life and cutting maintenance.

Superior corrosion resistance
CVD SiC surface protects against aggressive chemistries and diverse atmospheres for long-term stability.

Applications

Semiconductor: Oxidation, diffusion, annealing—any step requiring strict temperature uniformity and cleanliness.
Photovoltaics: Wafer texturing, diffusion, passivation with stable, repeatable results.
Advanced materials & heat treatment: Uniform high-temperature environments for R&D and production equipment.

FAQ

Q1: Main applications?
A: Semiconductor, photovoltaic, and advanced materials processes—e.g., diffusion, oxidation, annealing, and passivation—where atmosphere and temperature uniformity drive yield.

Q2: Maximum operating temperature?
A: Rated to ≤ 1300 ℃; typical continuous operation is around 1200 ℃ with excellent structural stability.

Q3: How does it compare to quartz or alumina tubes?
A: SiC provides higher temperature capability, much better thermal conductivity, superior thermal-shock resistance, longer service life, and markedly lower impurity levels—ideal for modern semiconductor and PV requirements.

About Us

XKH specializes in high-tech development, production, and sales of special optical glass and new crystal materials. Our products serve optical electronics, consumer electronics, and the military. We offer Sapphire optical components, mobile phone lens covers, Ceramics, LT, Silicon Carbide SIC, Quartz, and semiconductor crystal wafers. With skilled expertise and cutting-edge equipment, we excel in non-standard product processing, aiming to be a leading optoelectronic materials high-tech enterprise.