Ultra-Precision SiC Air-Bearing Stage

Short Description:

With the continuous evolution of the semiconductor industry, processing and inspection equipment demand ever-higher performance. Building on extensive expertise in motion control and nanometer-level positioning, we have developed a planar H-type dual-axis ultra-precision air-bearing stage.

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Features

Detailed Diagram

Overview

Engineered with a finite-element-optimized silicon carbide (SiC) ceramic structure and compensated air-bearing technology, the stage delivers outstanding accuracy, rigidity, and dynamic response. It is ideally suited for:

Semiconductor processing and inspection
Micro/nano fabrication and metrology
Nanometer-scale fly-cutting and polishing
High-speed precision scanning

Key Features

SiC air-bearing guideway for ultra-high stiffness and precision
High dynamics: velocity up to 1 m/s, acceleration up to 4 g, rapid settling
Dual-drive gantry Y-axis ensures high load capacity and stability
Encoder options: optical grating or laser interferometer
Positioning accuracy: ±0.15 μm; repeatability: ±75 nm
Optimized cable routing for clean design and long-term reliability
Customizable configurations for application-specific needs

Ultra-Precision Design & Direct-Drive, Non-Contact Architecture

SiC Ceramic Frame: ~5× the stiffness of aluminum alloy and ~5× lower thermal expansion, ensuring high-speed stability and thermal robustness.
Compensated Air-Bearing: Proprietary design enhances stiffness, load capacity, and motion stability.
Dynamic Performance: Supports 1 m/s velocity and 4 g acceleration, ideal for high-throughput processes.
Seamless Integration: Compatible with vibration isolation systems, rotary stages, tilt modules, and wafer handling platforms.
Cable Management: Controlled bending radius minimizes stress for extended service life.

Coreless Linear Motor: Smooth motion with zero cogging force.
Multi-Motor Drive: Load-plane motor placement improves straightness, flatness, and angular precision.
Thermal Isolation: Motors are isolated from the stage structure; optional air or water cooling for high-duty cycles.

Specifications

Model	400-400	500-500	600-600
Axes	X (scan) / Y (step)	X (scan) / Y (step)	X (scan) / Y (step)
Travel (mm)	400 / 400	500 / 500	600 / 600
Accuracy (μm)	±0.15	±0.2	±0.2
Repeatability (nm)	±75	±100	±100
Resolution (nm)	0.3	0.3	0.3
Max Speed (m/s)	1	1	1
Acceleration (g)	4	4	4
Straightness (μm)	±0.2	±0.3	±0.4
Stability (nm)	±5	±5	±5
Max Load (kg)	20	20	20
Pitch/Roll/Yaw (arc-sec)	±1	±1	±1

Test Conditions:

Air supply: clean, dry; dew point ≤ 0°F; particle filtration ≤ 0.25 μm; or 99.99% nitrogen.
Accuracy measured 25 mm above stage center at 20±1 °C, 40–60% RH.

Applications

Semiconductor lithography, inspection, and wafer handling
Micro/nano fabrication and precision metrology
High-end optics manufacturing and interferometry
Aerospace and advanced scientific research

FAQ – Silicon Carbide Air-Bearing Stage

1. What is an air-bearing stage?

An air-bearing stage uses a thin film of pressurized air between the stage and guideway to provide frictionless, wear-free, and ultra-smooth motion. Unlike conventional mechanical bearings, it eliminates stick-slip, delivers nanometer-level accuracy, and supports long-term reliability.

2. Why use silicon carbide (SiC) for the stage structure?

High stiffness: ~5× that of aluminum alloy, minimizing deformation during dynamic motion.
Low thermal expansion: ~5× lower than aluminum, maintaining accuracy under temperature variations.
Lightweight: Lower density compared to steel, enabling high-speed and high-acceleration operation.
Excellent stability: Superior damping and rigidity for ultra-precision positioning.

3. Does the stage require lubrication or maintenance?

No traditional lubrication is needed since there is no mechanical contact. Recommended maintenance includes:

Supplying clean, dry compressed air or nitrogen
Periodic inspection of filters and dryers
Monitoring cables and cooling systems

4. What are the air supply requirements?

Dew point: ≤ 0 °F (≈ –18 °C)
Particle filtration: ≤ 0.25 μm
Clean, dry air or 99.99% pure nitrogen
Stable pressure with minimal fluctuation

About Us

XKH specializes in high-tech development, production, and sales of special optical glass and new crystal materials. Our products serve optical electronics, consumer electronics, and the military. We offer Sapphire optical components, mobile phone lens covers, Ceramics, LT, Silicon Carbide SIC, Quartz, and semiconductor crystal wafers. With skilled expertise and cutting-edge equipment, we excel in non-standard product processing, aiming to be a leading optoelectronic materials high-tech enterprise.