Silicon Carbide (SiC) Wafer Boat
Detailed Diagram
Overview of Quartz Glass
The Silicon Carbide (SiC) wafer boat is a semiconductor process carrier made of high-purity SiC material, designed to hold and transport wafers during critical high-temperature processes such as epitaxy, oxidation, diffusion, and annealing.
With the rapid development of power semiconductors and wide bandgap devices, conventional quartz boats face limitations such as deformation at high temperatures, severe particle contamination, and short service life. SiC wafer boats, featuring superior thermal stability, low contamination, and extended lifetime, are increasingly replacing quartz boats and becoming the preferred choice in SiC device manufacturing.
Key Features
1. Material Advantages
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Manufactured from high-purity SiC with high hardness and strength.
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Melting point above 2700°C, much higher than quartz, ensuring long-term stability in extreme environments.
2. Thermal Properties
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High thermal conductivity for rapid and uniform heat transfer, minimizing wafer stress.
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Coefficient of thermal expansion (CTE) closely matches SiC substrates, reducing wafer bowing and cracking.
3. Chemical Stability
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Stable under high temperature and various atmospheres (H₂, N₂, Ar, NH₃, etc.).
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Excellent oxidation resistance, preventing decomposition and particle generation.
4. Process Performance
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Smooth and dense surface reduces particle shedding and contamination.
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Maintains dimensional stability and load capacity after long-term use.
5. Cost Efficiency
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3–5 times longer service life than quartz boats.
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Lower maintenance frequency, reducing downtime and replacement costs.
Applications
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SiC Epitaxy: Supporting 4-inch, 6-inch, and 8-inch SiC substrates during high-temperature epitaxial growth.
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Power Device Fabrication: Ideal for SiC MOSFETs, Schottky Barrier Diodes (SBDs), IGBTs, and other devices.
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Thermal Treatment: Annealing, nitridation, and carbonization processes.
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Oxidation & Diffusion: Stable wafer support platform for high-temperature oxidation and diffusion.
Technical Specifications
| Item | Specification |
|---|---|
| Material | High-purity Silicon Carbide (SiC) |
| Wafer Size | 4-inch / 6-inch / 8-inch (customizable) |
| Max Operating Temp. | ≤ 1800°C |
| Thermal Expansion CTE | 4.2 × 10⁻⁶ /K (close to SiC substrate) |
| Thermal Conductivity | 120–200 W/m·K |
| Surface Roughness | Ra < 0.2 μm |
| Parallelism | ±0.1 mm |
| Service Life | ≥ 3× longer than quartz boats |
Comparison: Quartz Boat vs. SiC Boat
| Dimension | Quartz Boat | SiC Boat |
|---|---|---|
| Temperature Resistance | ≤ 1200°C, deformation at high temp. | ≤ 1800°C, thermally stable |
| CTE Match with SiC | Large mismatch, risk of wafer stress | Close match, reduces wafer cracking |
| Particle Contamination | High, generates impurities | Low, smooth and dense surface |
| Service Life | Short, frequent replacement | Long, 3–5× longer lifespan |
| Suitable Process | Conventional Si epitaxy | Optimized for SiC epitaxy & power devices |
FAQ – Silicon Carbide (SiC) Wafer Boats
1. What is a SiC wafer boat?
A SiC wafer boat is a semiconductor process carrier made of high-purity silicon carbide. It is used to hold and transport wafers during high-temperature processes such as epitaxy, oxidation, diffusion, and annealing. Compared to traditional quartz boats, SiC wafer boats offer superior thermal stability, lower contamination, and longer service life.
2. Why choose SiC wafer boats over quartz boats?
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Higher temperature resistance: Stable up to 1800°C vs. quartz (≤1200°C).
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Better CTE match: Close to SiC substrates, minimizing wafer stress and cracking.
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Lower particle generation: Smooth, dense surface reduces contamination.
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Longer lifetime: 3–5 times longer than quartz boats, lowering cost of ownership.
3. What wafer sizes can SiC wafer boats support?
We provide standard designs for 4-inch, 6-inch, and 8-inch wafers, with full customization available to meet customer needs.
4. In which processes are SiC wafer boats commonly used?
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SiC epitaxial growth
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Power semiconductor device manufacturing (SiC MOSFETs, SBDs, IGBTs)
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High-temperature annealing, nitridation, and carbonization
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Oxidation and diffusion processes
About Us
XKH specializes in high-tech development, production, and sales of special optical glass and new crystal materials. Our products serve optical electronics, consumer electronics, and the military. We offer Sapphire optical components, mobile phone lens covers, Ceramics, LT, Silicon Carbide SIC, Quartz, and semiconductor crystal wafers. With skilled expertise and cutting-edge equipment, we excel in non-standard product processing, aiming to be a leading optoelectronic materials high-tech enterprise.
