Premium Sapphire Lift Pins Single crystal Al₂O₃ Wafer lift pin

Short Description:

Sapphire Lift Pins represent a critical advancement in semiconductor processing components, engineered from ultra-high-purity single-crystal sapphire (Al₂O₃) to meet the exacting demands of modern microfabrication technologies. These precision components have become indispensable in semiconductor device manufacturing, LED epitaxial growth systems, and advanced wafer processing applications. The unique crystalline structure of synthetic sapphire imparts extraordinary material properties that enable these lift pins to outperform conventional alternatives in the most challenging operational environments. Their exceptional thermal stability maintains mechanical integrity across extreme temperature gradients, while their inherent chemical resistance ensures consistent performance when exposed to aggressive process chemistries. This combination of attributes makes Sapphire Lift Pins the preferred solution for critical wafer handling applications where nanometer-level precision, contamination control, and process reliability are paramount.

Send email to us

Product Detail

Product Tags

Technical parameters

Chemical composition	Al2O3
Hardness	9Mohs
Optic nature	Uniaxial
Refractive index	1.762-1.770
Birefringence	0.008-0.010
Dispersion	Low, 0.018
Lustre	Vitreous
Pleochroism	Moderate to Strong
Diameter	0.4mm-30mm
Diameter tolerance	0.004mm-0.05mm
length	2mm-150mm
length tolerance	0.03mm-0.25mm
Surface quality	40/20
Surface roundness	RZ0.05
Custom shape	both ends flat, one end redius, both end redius, saddle pins and special shapes

Key Features

1.Exceptional Hardness & Wear Resistance: With a Mohs hardness rating of 9, second only to diamond, Sapphire Lift Pins demonstrate wear characteristics that dramatically outperform traditional silicon carbide, alumina ceramic, or metal alloy alternatives. This extreme hardness translates to significantly reduced particulate generation and maintenance requirements, with service lifetimes typically 3-5 times longer than conventional materials in comparable applications.

2.Superior High-Temperature Resistance: Engineered to withstand sustained operation at temperatures exceeding 1000°C without degradation, Sapphire Lift Pins maintain dimensional stability and mechanical strength in the most demanding thermal processes. This makes them particularly valuable for critical applications such as chemical vapor deposition (CVD), metal-organic chemical vapor deposition (MOCVD), and high-temperature annealing systems where thermal expansion mismatch can compromise process yields.

3.Chemical Inertness: The single-crystal sapphire structure demonstrates remarkable resistance to attack from HF acid, chlorine-based chemistries, and other aggressive process gases commonly encountered in semiconductor fabrication. This chemical stability ensures consistent performance in plasma environments and prevents the formation of surface defects that could lead to wafer contamination.

4.Low Particle Contamination: Manufactured from defect-free, high-purity sapphire crystals (typically >99.99%), these lift pins exhibit minimal particle shedding even after extended use. Their non-porous surface structure and polished finishes meet the most stringent cleanroom requirements, directly contributing to improved process yields in advanced node semiconductor manufacturing.

High-Precision Machining: Utilizing advanced diamond grinding and laser processing techniques, Sapphire Lift Pins can be produced with sub-micron tolerances and surface finishes below 0.05μm Ra. Custom geometries including tapered profiles, special tip configurations, and integrated alignment features can be engineered to address specific wafer handling challenges in next-generation fabrication equipment.

Primary Applications

1.Semiconductor Manufacturing: Sapphire Lift Pins play a critical role in advanced wafer processing systems, providing reliable support and precise positioning during photolithography, etching, deposition, and inspection processes. Their thermal and chemical stability makes them particularly valuable in EUV lithography tools and advanced packaging applications where dimensional stability at nanometer scales is essential.

2.LED Epitaxy (MOCVD): In gallium nitride (GaN) and related compound semiconductor epitaxial growth systems, Sapphire Lift Pins provide stable wafer support at temperatures often exceeding 1000°C. Their matched thermal expansion characteristics with sapphire substrates minimize wafer bowing and slip formation during the epitaxial growth process.

3.Photovoltaic Industry: High-efficiency solar cell manufacturing benefits from sapphire's unique properties in high-temperature diffusion, sintering, and thin-film deposition processes. The pins' wear resistance is particularly valuable in mass production environments where component longevity directly impacts manufacturing costs.

4.Precision Optics & Electronics Processing: Beyond semiconductor applications, Sapphire Lift Pins find use in handling delicate optical components, MEMS devices, and specialty substrates where contamination-free processing and scratch prevention are critical. Their electrical insulation properties make them ideal for applications involving electrostatic-sensitive devices.

XKH's services for sapphire lift pins

XKH provides comprehensive technical support and customized solutions for Sapphire Lift Pins:

1. Custom Development Services
· Support for dimensional, geometric and surface treatment customization
· Material selection and technical parameter optimization recommendations
· Collaborative product design and simulation verification
2. Precision Manufacturing Capabilities
· High-precision machining with tolerances controlled within ±1μm
· Special treatments including mirror polishing and edge chamfering
· Optional surface modification solutions such as anti-stick coatings
3. Quality Assurance System
· Strict implementation of incoming material inspection and process control
· Full-dimensional optical inspection and surface morphology analysis
· Provision of product performance test reports
4. Supply Chain Services
· Rapid delivery of standard products
· Dedicated inventory management for key accounts
5. Technical Support
· Application solution consulting
· Prompt after-sales response
We are committed to providing high-quality Sapphire Lift Pins products and professional technical services to meet the stringent requirements of semiconductor, LED and other advanced industries.