High Purity Quartz Tubes for Semiconductor Optical Industrial
Detailed Diagram
Overview of Quartz Glass
High-purity quartz tubes are engineered from premium-grade fused silica, offering outstanding thermal stability, chemical resistance, and optical performance. With excellent resistance to high temperatures, thermal shock, and corrosive environments, quartz tubes are widely used in semiconductor manufacturing, photovoltaic processing, laboratory equipment, optical systems, and high-temperature industrial applications.
Our quartz tubes are manufactured through advanced melting and precision processing technologies to ensure high purity, dimensional accuracy, and excellent surface quality. They are available in various sizes, wall thicknesses, and customized specifications to meet the requirements of different application scenarios.
Key Features of Quartz tube
1. Exceptional High-Temperature Performance
Quartz tubes can withstand continuous operation at high temperatures and maintain excellent structural stability. They are suitable for high-temperature processes such as oxidation, diffusion, annealing, and thermal treatment.
2. High Purity and Low Contamination
Manufactured from high-purity quartz materials, our quartz tubes feature extremely low impurity levels, minimizing contamination risks in sensitive processes such as semiconductor fabrication and photovoltaic manufacturing.
3. Excellent Chemical Resistance
Quartz tubes provide outstanding resistance against most acids, solvents, and corrosive gases, ensuring long service life in harsh chemical environments.
4. Superior Thermal Shock Resistance
With a very low coefficient of thermal expansion, quartz tubes can withstand rapid temperature changes without cracking or deformation, improving process reliability.
5. High Optical Transparency
Fused quartz offers excellent transmission from ultraviolet (UV) to infrared (IR) wavelengths, making quartz tubes ideal for optical applications, UV systems, and heating equipment.
Applications
- Semiconductor Manufacturing
- Diffusion furnace tubes
- Oxidation furnace tubes
- CVD and PECVD process chambers
- Wafer processing equipment
- Photovoltaic Industry
- Solar cell production equipment
- Thermal processing systems
- High-temperature reaction chambers
- Laboratory & Research Equipment
- Quartz reaction tubes
- High-temperature experiment systems
- Chemical analysis equipment
- Optical Applications
- UV light systems
- Laser equipment
- Optical heating systems
- Industrial Heating Systems
- Furnace components
- Heating protection tubes
- High-temperature processing equipment
Typical Specifications
| Parameter | Specification |
|---|---|
| Material | High-purity Fused Quartz / Fused Silica |
| Purity | ≥99.99% SiO₂ (customizable) |
| Operating Temperature | Up to 1100–1200°C (continuous use) |
| Softening Point | Approx. 1680°C |
| Thermal Expansion Coefficient | ~0.55 × 10⁻⁶ /K |
| Hydroxyl Content (OH) | Customized according to requirements |
| Surface Quality | Polished / Ground / Custom |
| Outer Diameter | Customizable |
| Wall Thickness | Customizable |
| Length | Customizable |
Frequently Asked Questions About Quartz Tubes
1. Are quartz tubes suitable for semiconductor manufacturing?
Yes. High-purity quartz tubes are widely used in semiconductor processing equipment, including diffusion furnaces, oxidation systems, annealing equipment, and other high-temperature wafer processing applications. Their low contamination potential and thermal stability help support consistent manufacturing conditions.
2. What is the difference between quartz tubes and ordinary glass tubes?
Quartz tubes generally offer much higher temperature resistance, lower thermal expansion, and better thermal shock resistance than ordinary soda-lime glass tubes. They can also provide superior performance in demanding high-purity and optical applications. Ordinary glass may be more economical for applications that do not require these specialized properties.
3. Are quartz tubes resistant to chemical corrosion?
Quartz tubes exhibit excellent resistance to many acids and chemical reagents. However, they are vulnerable to hydrofluoric acid and can be attacked by strong alkaline solutions, particularly at elevated temperatures. Chemical compatibility should always be evaluated according to the specific medium, concentration, and operating temperature.
About Us
XKH specializes in high-tech development, production, and sales of special optical glass and new crystal materials. Our products serve optical electronics, consumer electronics, and the military. We offer Sapphire optical components, mobile phone lens covers, Ceramics, LT, Silicon Carbide SIC, Quartz, and semiconductor crystal wafers. With skilled expertise and cutting-edge equipment, we excel in non-standard product processing, aiming to be a leading optoelectronic materials high-tech enterprise.











